Intlvac Systems

  • NanochromeTM

    The NanochromeTM suite of systems are highly configurable and can be outfitted with a mix of Magnetron Sputtering and Thermal and Electron Beam Evaporation. They are typically used for Precision Optics, Electronics and MEMS / NEMS applications.

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  • Nanoquest

    The Nanoquest is built around a direct water cooled rotating substrate. It is typically used for Ion Beam Sputtering and Etching which makes it ideal for MEMS / NEMS and Precision Optics applications.

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  • Diamond Like Carbon

    Intlvac's DLC is a fully automated PECVD platform for DLC, Infrared Anti-reflective coating and other PECVD applications where chemical and wear resistance are required.

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  • PleiadesTM Cluster System

    The PleiadesTM is a cluster system designed to combine multiple Nanoquest and Nanochrome chambers. It offers a large range of applications and the possibility to combine different deposition technologies within separate chambers.

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  • Fiber Metalization

    The MIDASTM Metalization System is designed to produce a single or multi-layer symmetrical metal coating on ends, mid spans, or windows of optical fibers for use in a hermetically sealed opto-electric package.

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  • Thermal Vacuum

    Intlvac’s Thermal Vacuum System is a versatile space simulation system, with a large vacuum chamber designed to provide an extensive environmental test complex to simulate outer space and varying thermal conditions.

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Process Techniques

  • Magnetron Sputtering

    Magnetron Sputtering is a technique where a solid target is bombarded with energetic ions generated in a magnetron causing atoms to be ejected. 

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  • Ion Beam Etching

    Ion Beam Etch (IBE) technology allows films to be etched or deposited by the use of beams of charged ions in a high vacuum system. 

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  • E-Beam Evaporation

    PVD technique where an intense electron beam generated from a filament is steered via electric and magnetic fields to strike source material and vaporize it within a vacuum environment.

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  • Long Throw Evaporation

    Optimize the thermal evaporation of indium and other materials for solder bump structures using "lift-off" vacuum deposition.

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  • Ion Beam Assisted Deposition

    A materials engineering technique that combines ion implantation with simultaneous sputtering or another PVD technique.

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  • Thermal Evaporation

    A PVD technique where a material is heated in a vacuum chamber until its surface atoms have sufficient energy to leave the surface.

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