IBSD Systems

  • Nanoquest I IBSD

    The Nanoquest I IBSD deposits on 100mm diameter substrates and smaller. It is a compact tool which brings premium PVD deposition capability to thin film fabrication. The versatile technology sputters at low pressure metals & dielectrics without powered cathodes. It is equipped with a multi-target carousel, rotating and angle-tilt substrate stage and ion assist capability. It produces coatings with high density, low particles, smooth and stable material properties.

  • Nanoquest I IBSD Combo

    The Nanoquest I IBSD Combo deposits and etches on 100mm diameter substrates and smaller. It is a compact tool which brings premium PVD deposition to thin film fabrication and full ion beam etch capability. The technology sputters at low pressure metals & dielectrics without powered cathodes. It is equipped with a multi-target carousel; water-cooled, rotating and angle-tilt substrate stage and ion beam etch capability. While producing the reputable high quality IBSD coatings, the same tool can planarize films and etch patterned wafers.

  • Nanoquest II IBSD

    The Nanoquest II IBSD deposits on 150mm diameter substrates and smaller. The platform brings premium PVD deposition capability to thin film fabrication. The technology sputters at low pressure metals & dielectrics without powered cathodes. It is equipped with a large multi-target carousel, rotating and angle-tilt substrate stage, ion assist capability and monitoring. It produces coatings with high density, low particles, smooth and stable material properties.

  • Nanoquest III IBSD

    The Nanoquest III IBSD deposits on 200mm diameter substrates and smaller. It is a batch tool which brings premium PVD deposition capability to thin film fabrication. The technology sputters at low pressure metals & dielectrics without powered cathodes. It is equipped with a multi-target carousel, planetary double rotation and angle-tilt substrate stage and ion assist capability. It produces coatings with high density, low particles, smooth and stable material properties.


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