Systems

  • Nanochrome I

    Nanochrome I is an R&D / Pilot Electron Beam Evaporator with a variety of possible configurations.

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  • Nanochrome II

    Nanochrome II is the ideal platform for high temperature PVD processes. The system can be configured for a wide variety of deposition sources.

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  • Nanochrome IV

    The Nanochrome IV PARMS system produces dielectric thin film layers with final reaction and film densification at the substrate surface using a high current.

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  • Long Throw Evaporator

    The Nanochrome I Long Throw Evaporator provides the layout, process tools, environment and deposition control to achieve the desired properties for successful Indium bump designs.

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  • Pleiades Cluster System

    The Pleiades (Seven Sisters) Cluster System is designed to combine multiple Nanoquest and Nanochrome chambers. It offers a large range of applications and the possibility to combine different deposition technologies within separate chambers.

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