Nanoquest Pico

Compact Ion Milling Platform for Thin Film R&D

The Intlvac Nanoquest Pico is the ultimate compact ion milling platform for research and development of thin film applications such as Data Storage, Spintronics, and Semiconductors. Designed with flexibility in mind, the system can be configured for a variety of ion sources and gases, depending on your application.

With a 14” D-shaped chamber and a small footprint, the Nanoquest Pico is engineered to fit into any laboratory setting. It is ideal for fast etching of thin films that are not compatible with conventional chemical or dry etching methods.

Nanoquest Pico

Compact Ion Milling Platform for Thin Film R&D

The Intlvac Nanoquest Pico is the ultimate compact ion milling platform for research and development of thin film applications such as Data Storage, Spintronics, and Semiconductors. Designed with flexibility in mind, the system can be configured for a variety of ion sources and gases, depending on your application.

With a 14” D-shaped chamber and a small footprint, the Nanoquest Pico is engineered to fit into any laboratory setting. It is ideal for fast etching of thin films that are not compatible with conventional chemical or dry etching methods.

Key Benefits

  • Compact, low cost platform
  • Actively cooled stage
  • Substrate rotation and tilt
  • High speed vacuum pumps for fast pump down
  • Multiple configuration options

Applications

  • Semiconductor
  • Nanotechnology
  • Photonics
  • Spintronics

Process Methods

  • Ion Beam Etching (IBE)
  • Reactive Ion Beam Etching (RIBE)

Materials

  • Noble Metals 
  • Insulators
  • Diamond Films
  • Optical Wave Guides
  • Superconducting Materials
  • Magnetic Materials

Ion Beam Etching

The Nanoquest Pico is designed for etching small wafers and dies, making it especially well-suited for fast, precise etching in R&D environments. The system supports ion beam and reactive ion beam etching, with multiple ion source configurations available to match a wide range of materials and process requirements.


Specifications

Substrate Fixturing:

  • Rotating cooled substrate holder
  • 0 – 10 RPM rotation speed

Substrate Size:

  • Up to 100mm diameter

Ion Milling Options:

  • 1cm DC Ion Source:
    • 10mA beam current
    • Up to 500eV ion energy
  • 4cm DC Ion Source:
    • Up to 120mA beam current
    • 1200eV ion energy
    • Filament neutralizer
  • 4cm RFICP Ion Source:
    • 150mA beam current
    • 100–1200eV ion energy
    • Low energy remote neutralizer
  • 8cm DC Ion Source:
    • 250mA beam current
    • 100–1200eV ion energy
    • Filament neutralizer

Ion Beam Etching

Download our Latest Brochure to Learn More about the Nanoquest Pico System

  • Compact, low cost platform
  • Actively cooled stage
  • Substrate rotation and tilt
  • High speed vacuum pumps for fast pump down
  • Multiple configuration options

The Nanoquest Pico is the ultimate compact ion milling platform for research and development of thin film applications such as Data Storage, Spintronics, and Semiconductors. It can be configured for a number of ion sources and gases depending on your application. With its 16” D-shaped chamber and small footprint, it can fit into any lab.

The Nanquest Pico is designed to etch small wafers and dies and is ideal for fast etching of thin films that do not respond well to conventional chemical or dry etching processes.

Empty
Click + to add content