Nanochrome™ V: Advanced Sputtering System

Precision Coating Technology

The Nanochrome™ V is a state-of-the-art system designed for Plasma-Assisted Evaporation and Sputtering. With unmatched reliability and precision, it consistently deposits high-quality thin films for a variety of applications, making it the perfect solution for both production and research environments.

Nanochrome™ V: Advanced Sputtering System

Precision Coating Technology

The Nanochrome™ V is a state-of-the-art system designed for Plasma-Assisted Evaporation and Sputtering. With unmatched reliability and precision, it consistently deposits high-quality thin films for a variety of applications, making it the perfect solution for both production and research environments.

What is Sputtering?

Sputtering is the process of ejecting particles from the surface of a target material by bombarding it with energetic plasma or gas particles, often referred to as a working gas. This process is widely used to coat thin films onto substrates, offering:

  • Physical/Chemical Protection.
  • Light Filtering Capabilities
  • Enhanced Electrical/Thermal Properties
  • Coating on Complex Geometries

Why Choose Nanochrome™ V?

Superior Features:

  • Manual or Automatic Substrate Load Locks
  • Automated Thin Film Deposition via Intlvac Software
  • Touchscreen Interface for Easy Navigation
  • Stable, Reliable, and Highly Repeatable Processes
  • Upgradable Design for Future Needs

Highlights:

  • State-of-the-art dry pumping systems
  • 500mm OD substrate with up to 20kg capacity
  • Metals & dielectrics deposition (RF, DC, Pulsed DC)
  • Growth rates of up to 5Å/s for oxides
  • Adaptive optical control (wavelengths from 400–1650 nm)

Performance Benefits

  • Enhanced Packing Density: Achieve better results versus traditional evaporation techniques.
  • Reactive Metal Targeting: Create oxides and nitrides with ease.
  • Faster Cycle Times: Save time without compromising on quality.

Designed for Reliability and Ease

  • Machine Longevity: Built to last, even in demanding applications.
  • On-Demand Support: Intlvac offers industry-leading customer service.
  • User-Friendly Operation: Easy-to-learn software with manual mode flexibility.
  • Comprehensive Process Control: From logging operations to endpoint monitoring.

Technical Specifications

Deposition Chamber:

  • Stainless Steel Clam Shell design for easy access
  • 48” diameter x 40” height with minimal outgassing

Substrate Holders:

  • Rotatable 500mm OD disk
  • Supports parts up to 20kg

Gas Control:

  • Supports Argon, O2, and N2
  • Pneumatically actuated gas line valves

Heating:

  • IR radiators capable of heating substrates up to 200°C

Vacuum Pumping:

  • High vacuum achieved in 45 minutes to 5E-6 Torr
  • Two wide-range maglev pumps and Leybold dry pumps

Intlvac Ion Source

Our in-house designed gridless End Hall Ion Source is engineered for substrate pre-cleaning and assist. With angular and linear adjustment, it ensures precision and optimal performance.

Intlvac Software: Automating the Process

The Nanochrome™ V’s software automates key functions such as pump down, gas flow, ion source, and sputtering, making operations:

  • Simple to Operate
  • Time and Cost Efficient
  • Highly Stable and Reliable

Software Features:

  • Easy process programming
  • Multiple access levels for user flexibility
  • Manual mode available for advanced control

Intlvac Support

We take pride in offering unmatched customer support to ensure your success:

  • Process Programming Support
  • Remote Connection Assistance
  • On-Site Training
  • User Assistance Anytime

Applications of Thin Films

Thin films created by the Nanochrome™ V can be used for:

  • Protective layers (physical and chemical)
  • Light filtering
  • Enhanced electrical or thermal properties
  • Coating objects with complex geometries

Applications of Thin Films

Thin films created by the Nanochrome™ V can be used for:

  • Protective layers (physical and chemical)
  • Light filtering
  • Enhanced electrical or thermal properties
  • Coating objects with complex geometries

Applications of Thin Films

Thin films created by the Nanochrome™ V can be used for:

  • Protective layers (physical and chemical)
  • Light filtering
  • Enhanced electrical or thermal properties
  • Coating objects with complex geometries

Ready to Learn More?

Contact Intlvac today and experience why Nanochrome™ V is the ultimate sputtering and thin film deposition system. Whether you're in research or production, this system is your partner for innovation.

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