Organic Electronics and OLED's

  • Nanoquest I

    The Nanoquest I Ion Beam Etching system is an ideal and versatile platform for etching single wafer substrates up to 6".

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  • Nanochrome II

    Nanochrome II is the ideal platform for high temperature PVD processes. The system can be configured for a wide variety of deposition sources.

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  • Nanochrome IV

    The Nanochrome IV PARMS system produces dielectric thin film layers with final reaction and film densification at the substrate surface using a high current.

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